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Newly developed GaN based MEMS resonator operates stably even at high temperatureBy: on January 15, 2021 at 2:13 pm Publication: Top Technology News — ScienceDaily

JST PRESTO researcher developed a MEMS resonator that stably operates even under high temperatures by regulating the strain caused by the heat from gallium nitride (GaN). This device is small, highly sensitive and can be integrated with CMOS technology promising for the application to 5G communicati  Read More>>

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